BROOKS 6256S/6256SCZVCMAC GAS: O2 FLOW RATE: 20 SLPM/[7016]

BROOKS 6256S/6256SCZVCMAC GAS: O2 FLOW RATE: 20SLPM/[7012]

BROOKS 6256S/6256SCZVCMAC GAS: NF3 FLOW RATE: 5 SLPM/[7005]

BROOKS 6256S/6256SCZVCMAC GAS:NF3 FLOW RATE:5 SLPM/[6994]

BROOKS 6256S/6256SCZVCMAC GAS: N2 FLOW RATE: 10SLPM/[7011]

BROOKS 6256S/6256SCZVCMAC GAS: N2 FLOW RATE: 10SLPM/[7014]

BROOKS 6256S GAS:SIH4 FLOW RATE: 2 SLPM/[7000]

BROOKS 6256S GAS:HE FLOW RATE:10 SLPM/[6996]