Lam Research Recipe Module 853-005684-001, Used

Greene Tweed Chemraz Wafer Pad PN: 5641-0162-SC513 Lam Research 713-021725-001

Lam Research Electrode Insert Screw PN: 715-1472-001

Lam Research O-Ring PN: 734-005271-001

Lam Research O-Ring, Viton, 1.734ID x 0.139C/S, Brown PN: 734-061280-224

Lam Research PN: 713-012527-002 REV: A Alpha Machine Co

Lam Research O-Ring, 0.029 ID x 0.040 C/S PN: 734-092561-001 FSI

Lam Research Bearing, Linear/Rotary 1" WTM PN: 19-034573-04