[Used] MKS, ASTEX / AX3076 / SMART MATCH

MKS ASTeX ASTRON 2L FI20620-1 REMOTE PLASMA SOURCE RPS GENERATOR

MKS R*EVOLUTION III AX7690-40 ASTEX REMOTE PLASMA SOURCE

MKS ASTEX FI20164-1 / AMAT 0190-51029

MKS Astex Astron 2L w/one missing CPU Board FI20620-1 AMAT 0920-00013

MKS Astex MAGNETRON HEAD 1.5 KW SXRHC MN:0190-09769 [Overhauled]

MKS AsTex Plasma Source Tube AX7610PSK-S /1000117048 (As-Is)

AX7658 or FI20620-1 MKS Astex 2L Remote Plasma Source RPS Unit