PLASMA SOURCE ASTeX SAPPHIRE AX7610-11 Rev F

ASTeX SAPPHIRE Plasma Source AX7610-11 Rev F

AX7610-5 / DOWNSTREAM PLASMA SOURCE, REPLACEABLE QUARTZ OR SAPPHIRE / ASTEX

MKS ASTeX AX7610-Q

MKS Astex AX7700 Astron Paragon Remote Plasma Source (RPS) , AX7700 Pilot

ASTeX DOWNSTREAM PLASMA SOURCE AX7610-12 Rev E LAM 765-013511-002

MKS ENI RPG-50A-MRG DC Plasma Generator

MKS smartpower magnetron power supply 6kw FI20110 downstream plasma AMAT astex