Used - AJA International Vacuum 19” Baseplate w/ 3 Magnetron Sputtering Cathodes

CUSTOM 4 INCH DC MAGNETRON SPUTTERING SYSTEM COATER

Oxford Instruments OPAL ALD Atomic Layer Deposition System Tag #52

Used - AJA International Stainless Vacuum Chamber Tag #0

Plasma CVD UHV Vacuum Deposition System w/ turbo pump 13.56 MHZ power supply

Used - AJA International Stainless Vacuum Base Plate Tag #8

MBraun Labmaster MB200MOD Glove Box w/4 Pocket Ebeam Evaporator O2 H2O sensors

8-pin electrical feedthrough 1.33" ConFlat (CF) flange UHV High Vacuum Chamber