STS Multiplex ICP Deep Reactive Ion Etch System (DRIE)

Oxford Instruments Plasmalab 800 Plus Reactive Ion Etching RIE System

Oxford Plasmalab System 100 Dry Etcher ECR

Oxford Instruments OPAL ALD Atomic Layer Deposition System Tag #52

Oxford Instruments 80+ PECVD ALD PlasmaLab System 2006 208V 3PH

Oxford Plasmalab System 100 Plus ICP Etcher System, 100mm

Oxford Instruments Plasmalab 80+ DPCVD

Used - Veeco RF-350 Ion Beam Etching System Tag #13