TOKYO ELECTRON TEL Tokyo Electron PWRCONT-ZZ-AI Power Controller 3M807-080702-24

TEL TOKYO ELECTRON LIMITED 3M87-019969 CM Controller

Tokyo Electron TEX-061 Chamber Trias Triase+ w/ 3M80 ЭМ81-050027-15 Boards

KITZ-SCT VACUUM VALVE VEP1 IVBH50CA-NWKL-52-W TOKYO ELECTRON TRIAS

Tokyo Electron SW300B/PMC2 TEX-061 CVD Chamber Trias Boards

TEL Tokyo Electron Limited SW300/HCF 3M81-029643-12 PC Control Board Used

TEL Tokyo Electron Limited SW300/DCONV 3M80-001583-11 PC Control Board Used

TEL TOKYO ELECTRON 3M87-021634 CONTROL UNIT ASSEMBLY