Unit, UFC-1020, 1 SLPM, O2, Mass Flow Controller, Used

Unit UFC-1020 Mass Flow Controller MFC, HCL, 500 SCCM

Unit UFC-1020 Mass Flow Controller MFC, O2, 400 SCCM

Unit UFC-1020 Mass Flow Controller MFC, C2F6, 50 SCCM

Unit UFC-1020 Mass Flow Controller MFC, CF4, 200 SCCM

Unit UFC-1020 Mass Flow Controller MFC, 15%PH3/SIH4 , 300 SCCM

Unit UFC-1020 Mass Flow Controller MFC, 50%PH3/N2, 100 SCCM

Unit UFC-1020 Mass Flow Controller MFC, SIH4, 10 SLM